These systems are highly capable when dealing with great magnification, and they posses accuracy up to 0.1 micron. These systems are fully automated and can be programmed to move in a three-dimensional set of coordinates. Furthermore, you can use the system manually with the help of a joystick through our easy to use VisionGauge® Online machine vision software.
VisionGauge® Online includes many features to make your automated flaw detection and wafer inspection effective and efficient. You can easily create your own programs using VisionGauge® OnLine to teach the machine how to perform the inspection. The software is capable of auto-focus, which provides you with accurate and highly repeatable results. In addition, VisionGauge® Online's auto-scan tool is capable of automatically detecting any flaws on the wafer. These systems are available with reflected or direct lighting.
You can automatically save measurement and inspection results, save the images for "Pass" or "Fail" parts of the wafer, control input and output signals based on inspection results, and even automatically create reports with this information.