JENOPTIK AG + Lambda Physik AG receive funding for nanotechnology joint venture

„The BMBF has approved the funding for the joint project to research the basic principles of EUV lithography and to develop EUV light sources and the corresponding metrology. XTREME technologies, of which Jenoptik and Lambda Physik each hold a 50% share, will coordinate the European consortium for the development of EUV beam sources.rn
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rnJenoptik and Lambda Physik will invest more than 10 million euros in XTREME technologies during the first stage of the development project (until 2004). EUV light sources for the next generation and beyond of optical microlithography are being developed at the Jena and Goettingen locations. Starting in 2007, EUV technology is expected to enable feature sizes of less than 50 nm, which will lead to significantly faster and more-efficient microchips.rn
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